Organic Light Emitting Display Devices

ABSTRACT

An organic light emitting display device includes a plurality of first electrodes, a pixel defining layer, a first intermediate layer, a fluorine-containing layer, an emitting layer and a second electrode. The first electrodes are spaced apart from each other on a substrate. The pixel defining layer is disposed on the substrate. The pixel defining layer partially exposes the first electrodes. The first intermediate layer is disposed on the substrate, the pixel defining layer and the exposed first electrodes. The fluorine-containing layer is formed on a portion of the first intermediate layer overlapping an upper surface of the pixel defining layer. The fluorine-containing layer includes fluorine diffused from the pixel defining layer or the first intermediate layer. The emitting layer is at least partially disposed on a portion of the first intermediate layer not including the fluorine-containing layer thereon. The second electrode is disposed on the emitting layer.

CLAIM OF PRIORITY

This application makes reference to, incorporates the same herein, andclaims all benefits accruing under 35 U.S.C. §119 from an applicationearlier filed in the Korean Intellectual Property Office (KIPO) on the20^(th) of Oct. 2011 and there duly assigned Serial No. 10-2011-0107651.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to organic light emitting devices. Moreparticularly, the invention relates to organic light emitting deviceshaving novel structures.

2. Description of the Related Art

An organic light emitting display (OLED) device may display desiredinformation such as images, letters and/or characters using a lightgenerated by the combination of holes provided from an anode andelectrons provided from a cathode in an organic layer thereof. The OLEDdevice may have several advantages, such as wide viewing angle, highresponse time, thin thickness and low power consumption, so that theOLED device may be widely employed in various electrical and electronicapparatuses. Recently, the OLED device has been rapidly developed as oneof the most promising display devices.

To form an organic emitting layer of the OLED device, a printing processusing an inkjet, a spin or a nozzle, a patterning process afterdepositing layers, and a transfer process using heat or laser have beenutilized. However, the organic emitting layer may not be formeduniformly in a pixel region of the OLED device with high resolutionand/or contrast by the above-mentioned processes. Particularly, as thesize of the OLED device increases, the organic emitting layer may not beprecisely patterned in a predetermined region with a high resolution.

SUMMARY OF THE INVENTION

The present invention provides an organic light emitting display deviceincluding an intermediate layer that may be divided into patterns havingdifferent properties relative to each other.

According to exemplary embodiments of the invention, there is providedan organic light emitting display device. The OLED device includes aplurality of first electrodes, a pixel defining layer, a firstintermediate layer, a fluorine-containing layer, an emitting layer and asecond electrode. The first electrodes are spaced apart from each otheron a substrate. The pixel defining layer is disposed on the substrate.The pixel defining layer partially exposes the first electrode. Thefirst intermediate layer is disposed on the substrate, the pixeldefining layer and the exposed first electrode. The fluorine-containinglayer is formed on a portion of the first intermediate layer overlappingan upper surface of the pixel defining layer. The fluorine-containinglayer includes fluorine diffused from the pixel defining layer or thefirst intermediate layer. The emitting layer is at least partiallydisposed on a portion of the first intermediate layer not including thefluorine-containing layer thereon. The second electrode is disposed onthe emitting layer.

In the exemplary embodiments, the first intermediate layer may include afirst pattern overlapping the exposed first electrode and a secondpattern overlapping the pixel defining layer. The second pattern mayhave an electrical conductivity less than that of the first pattern, oran electrical resistance greater than that of the first pattern. Thesecond pattern may have an upper surface higher than that of the firstpattern. The fluorine-containing layer may be formed on the secondpattern.

In the exemplary embodiments, the first intermediate layer may furtherinclude a third pattern overlapping a portion of the substrate betweenthe adjacent first electrodes spaced apart from each other. The thirdpattern may have an electrical conductivity less than that of the firstpattern, or an electrical resistance greater than that of the firstpattern. The fluorine-containing layer may include a firstfluorine-containing layer on the second pattern and a secondfluorine-containing layer on the third pattern. The third pattern mayhave an upper surface higher than that of the first pattern.

In the exemplary embodiments, the OLED device may further include a leadand a third electrode. The lead may be disposed on the substrate so asto be spaced apart from the first electrode. The third electrode mayextend on the second electrode and the substrate. The third electrodemay be electrically connected to the lead. The third electrode may bespaced apart from the first electrode by an insulation layer patternincluding the pixel defining layer and the first intermediate layer.

In the exemplary embodiments, the insulation layer pattern and thesecond electrode may share a common etched surface.

According to the exemplary embodiments, there is provided an organiclight emitting display device. The OLED device includes a firstelectrode, a first intermediate layer, an emitting layer and a secondelectrode. A plurality of first electrodes is provided, and the firstelectrodes are spaced apart from each other on a substrate. The firstintermediate layer covering the first electrode is disposed on thesubstrate. The emitting layer is disposed on the first intermediatelayer. The emitting layer overlaps the first electrode. The secondelectrode is disposed on the emitting layer. The first intermediatelayer includes a first pattern overlapping the first electrode, a secondpattern confining a lateral portion of the emitting layer, and a thirdpattern overlapping a portion of the substrate between the adjacentfirst electrodes spaced apart from each other. The third pattern has anelectrical conductivity less than that of the first pattern or anelectrical resistance greater than that of the first pattern.

In the exemplary embodiments, the emitting layer may extend continuouslyover the plurality of first electrodes. Alternatively, the emittinglayer may be confined by the second pattern and the third pattern so asto have an island shape.

In the exemplary embodiments, the third pattern may have an ink-affinityless than that of the first pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the third pattern. The fluorine-containing layer may includefluorine diffused from the first intermediate layer.

In the exemplary embodiments, the third pattern may have an uppersurface higher than that of the first pattern.

In the exemplary embodiments, the second pattern may have anink-affinity less than that of the first pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the second pattern. The fluorine-containing layer mayinclude fluorine diffused from the first intermediate layer.

In the exemplary embodiments, the second pattern may have an electricalconductivity less than that of the first pattern or an electricalresistance greater than that of the first pattern.

In the exemplary embodiments, the OLED device may further include a leadand a third electrode. The lead may be disposed on the substrate so asto be spaced apart from the first electrode. The third electrode mayextend on the second electrode and the substrate. The third electrodemay be electrically connected to the lead. The third electrode may bespaced apart from the first electrode by an insulation layer patternincluding the first intermediate layer.

In the exemplary embodiments, the insulation layer pattern and thesecond electrode may share a common etched surface.

According to the exemplary embodiments, there is provided an organiclight emitting display device. The OLED device includes a firstelectrode, a first intermediate layer, an emitting layer and a secondelectrode. A plurality of first electrodes is provided, and the firstelectrodes are spaced apart from each other on a substrate. The firstintermediate layer covering the first electrode is disposed on thesubstrate. The emitting layer is disposed on the first intermediatelayer. The emitting layer overlaps the first electrode. The secondelectrode is disposed on the emitting layer. The first intermediatelayer includes a first pattern overlapping the first electrode, a secondpattern confining a lateral portion of the emitting layer, and a thirdpattern overlapping a portion of the substrate between the adjacentfirst electrodes spaced apart from each other. The third pattern mayhave an ink-affinity less than that of the first pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the third pattern. The fluorine-containing layer may includefluorine diffused from the first intermediate layer.

In the exemplary embodiments, the third pattern may have an electricalconductivity less than that of the first pattern or an electricalresistance greater than that of the first pattern. The third pattern mayhave an upper surface higher than that of the first pattern.

In the exemplary embodiments, the second pattern may have anink-affinity less than that of the first pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the second pattern. The fluorine-containing layer mayinclude fluorine diffused from the first intermediate layer.

In the exemplary embodiments, the second pattern may have an electricalconductivity less than that of the first pattern or an electricalresistance greater than that of the first pattern.

In the exemplary embodiments, the emitting layer may extend continuouslyover the plurality of first electrodes. Alternatively, the emittinglayer may be confined by the second pattern and the third pattern so asto have an island shape.

In the exemplary embodiments, the OLED device may further include a leadand a third electrode. The lead may be disposed on the substrate so asto be spaced apart from the first electrode. The third electrode mayextend on the second electrode and the substrate. The third electrodemay be electrically connected to the lead. The third electrode may bespaced apart from the first electrode by an insulation layer patternincluding the first intermediate layer.

In the exemplary embodiments, the insulation layer pattern and thesecond electrode may share a common etched surface.

According to the exemplary embodiments, there is provided an organiclight emitting display device. The OLED device includes a firstelectrode, a first intermediate layer, an emitting layer and a secondelectrode. A plurality of first electrodes is provided, and the firstelectrodes are spaced apart from each other on a substrate. The firstintermediate layer covering the first electrode is disposed on thesubstrate. The emitting layer is disposed on the first intermediatelayer. The emitting layer overlaps the first electrode. The secondelectrode is disposed on the emitting layer. The first intermediatelayer includes a first pattern overlapping the first electrode, a secondpattern confining a lateral portion of the emitting layer, and a thirdpattern overlapping a portion of the substrate between the adjacentfirst electrodes spaced apart from each other. The third pattern mayhave an electrical conductivity greater than that of the second patternor an electrical resistance less than that of the second pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the second pattern. The fluorine-containing layer mayinclude fluorine diffused from the first intermediate layer.

In the exemplary embodiments, the second pattern may have an uppersurface higher than that of the third pattern.

In the exemplary embodiments, the OLED device may further include a leadand a third electrode. The lead may be disposed on the substrate so asto be spaced apart from the first electrode. The third electrode mayextend on the second electrode and the substrate. The third electrodemay be electrically connected to the lead. The third electrode may bespaced apart from the first electrode by an insulation layer patternincluding the first intermediate layer.

In the exemplary embodiments, the insulation layer pattern and thesecond electrode may share a common etched surface.

According to the exemplary embodiments, there is provided an organiclight emitting display device. The OLED device includes a firstelectrode, a first intermediate layer, an emitting layer and a secondelectrode. A plurality of first electrodes is provided, and the firstelectrodes are spaced apart from each other on a substrate. The firstintermediate layer covering the first electrode is disposed on thesubstrate. The emitting layer is disposed on the first intermediatelayer. The emitting layer overlaps the first electrode. The secondelectrode is disposed on the emitting layer. The first intermediatelayer includes a first pattern overlapping the first electrode, a secondpattern confining a lateral portion of the emitting layer, and a thirdpattern overlapping a portion of the substrate between the adjacentfirst electrodes spaced apart from each other. The third pattern mayhave an ink-affinity greater than that of the second pattern.

In the exemplary embodiments, a fluorine-containing layer may bedisposed on the second pattern. The fluorine-containing layer mayinclude fluorine diffused from the first intermediate layer.

In the exemplary embodiments, the second pattern may have an electricalconductivity less than that of the third pattern or an electricalresistance greater than that of the third pattern. The second patternmay have an upper surface higher than that of the third pattern.

In the exemplary embodiments, the OLED device may further include a leadand a third electrode. The lead may be disposed on the substrate so asto be spaced apart from the first electrode. The third electrode mayextend on the second electrode and the substrate. The third electrodemay be electrically connected to the lead. The third electrode may bespaced apart from the first electrode by an insulation layer patternincluding the first intermediate layer.

In the exemplary embodiments, the insulation layer pattern and thesecond electrode may share a common etched surface.

According to the exemplary embodiments, the OLED device may include afluorine-containing layer having a relatively low ink-affinity. Thefluorine-containing layer may be formed on a portion of a firstintermediate layer overlapping a pixel defining layer of the OLEDdevice. The first intermediate layer may include a first pattern, asecond pattern and/or a third pattern, each of which may have chemicalproperties (e.g., hydrophilicity, hydrophobicity, surface energy, etc.)and/or electrical properties (e.g., electrical conductivity, resistance,etc.) different from one another. A pixel region may be confined orlimited by the fluorine-containing layer, the first pattern, the secondpattern and/or the third pattern so that an emitting layer may be formedselectively in the pixel region. Therefore, the OLED device having ahigh resolution which may not be easily manufactured by a conventionalprinting process may be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete appreciation of the invention, and many of the attendantadvantages thereof, will be readily apparent as the same becomes betterunderstood by reference to the following detailed description whenconsidered in conjunction with the accompanying drawings, in which likereference symbols indicate the same or similar components, wherein:

FIG. 1 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with exemplary embodiments of theinvention;

FIGS. 2 through 4 are perspective and cross-sectional views illustratingthe organic light emitting display device of FIG. 1.

FIG. 5 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with some exemplary embodiments of theinvention;

FIGS. 6 through 14 are perspective and cross-sectional viewsillustrating the organic light emitting display device of FIG. 5;

FIG. 15 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with some exemplary embodiments of theinvention;

FIGS. 16 through 26 are perspective and cross-sectional viewsillustrating the organic light emitting display device of FIG. 15;

FIGS. 27 through 33 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith exemplary embodiments of the invention;

FIGS. 34 through 36 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith some exemplary embodiments of the invention; and

FIGS. 37 through 39 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith some exemplary embodiments of the invention.

DETAILED DESCRIPTION OF THE INVENTION

Various exemplary embodiments of the invention will be described morefully hereinafter with reference to the accompanying drawings, in whichsome exemplary embodiments are shown. The invention may, however, beembodied in many different forms and should not be construed as limitedto the exemplary embodiments set forth herein. Rather, these exemplaryembodiments are provided so that this description will be thorough andcomplete, and will fully convey the scope of the invention to thoseskilled in the art. In the drawings, the sizes and relative sizes oflayers and regions may be exaggerated for clarity.

It will be understood that, when an element or layer is referred to asbeing “on,” “connected to” or “coupled to” another element or layer, itcan be directly on, connected or coupled to the other element or layeror intervening elements or layers may be present. In contrast, when anelement is referred to as being “directly on,” “directly connected to”or “directly coupled to” another element or layer, there are nointervening elements or layers present. Like numerals refer to likeelements throughout. As used herein, the term “and/or” includes any andall combinations of one or more of the associated listed items.

It will be understood that, although the terms first, second, third etc.may be used herein to describe various elements, components, regions,layers and/or sections, these elements, components, regions, layersand/or sections should not be limited by these terms. These terms areonly used to distinguish one element, component, region, layer orsection from another element, component, region, layer or section. Thus,a first element, component, region, layer or section discussed belowcould be termed a second element, component, region, layer or sectionwithout departing from the teachings of the invention.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper” and the like, may be used herein for ease of description todescribe one element or feature's relationship to another element orfeature (or other elements or features) as illustrated in the figures.It will be understood that the spatially relative terms are intended toencompass different orientations of the device in use or operation inaddition to the orientation depicted in the figures. For example, if thedevice in the figures is turned over, elements described as “below” or“beneath” other elements or features would then be oriented “above” theother elements or features. Thus, the exemplary term “below” canencompass both an orientation of above and below. The device may beotherwise oriented (rotated 90 degrees or at other orientations) and thespatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particularexemplary embodiments only and is not intended to be limiting of theinvention. As used herein, the singular forms “a,” “an” and “the” areintended to include a plurality of forms as well, unless the contextclearly indicates otherwise. It will be further understood that theterms “comprises” and/or “comprising,” when used in this specification,specify the presence of stated features, integers, steps, operations,elements, components and/or groups thereof, but do not preclude thepresence or addition of one or more other features, integers, steps,operations, elements, components, and/or groups thereof.

Exemplary embodiments are described herein with reference tocross-sectional illustrations that are schematic illustrations ofidealized exemplary embodiments (and intermediate structures). As such,variations from the shapes of the illustrations as a result, forexample, of manufacturing techniques and/or tolerances, are to beexpected. Thus, exemplary embodiments should not be construed as limitedto the particular shapes of regions illustrated herein but are toinclude deviations in shapes that result, for example, frommanufacturing. For example, an implanted region illustrated as arectangle will, typically, have rounded or curved features and/or agradient of implant concentration at its edges rather than a binarychange from implanted to non-implanted region. Likewise, a buried regionformed by implantation may result in some implantation in the regionbetween the buried region and the surface through which the implantationtakes place. Thus, the regions illustrated in the figures are schematicin nature and their shapes are not intended to illustrate the actualshape of a region of a device, and are not intended to limit the scopeof the invention.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this invention pertains. It willbe further understood that terms, such as those defined in commonly useddictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andwill not be interpreted in an idealized or overly formal sense unlessexpressly so defined herein.

FIG. 1 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with exemplary embodiments of theinvention.

Referring to FIG. 1, the organic light emitting display (OLED) devicemay include a substrate 100, a first electrode 110, a pixel defininglayer (PDL) 120, a first intermediate layer 130, a fluorine-containinglayer 140, an emitting layer (EML) 150, a second intermediate layer 160,a second electrode 170, etc.

The substrate 100 may include a lower substrate (not illustrated) andlower structures (not illustrated) disposed on the lower substrate. Thelower structures may include a switching device, an insulation layer,etc. The lower substrate may also include a transparent substrate suchas a glass substrate, a quartz substrate, a transparent plasticsubstrate, etc. For example, the transparent plastic substrate mayinclude polyimide, acryl-based resin, polyethylene terephthalate (PET),polycarbonate, polyacrylate, polyether, etc. The switching device mayinclude a thin film transistor (TFT) or an oxide semiconductor device.

The first electrode 110 may be disposed on the substrate 100 having thelower structures. In exemplary embodiments, a plurality of the firstelectrodes 110 spaced apart from each other may be disposed on thesubstrate 100 regularly in a first direction. Furthermore, a pluralityof the first electrodes 110 spaced apart from each other may be disposedin a second direction substantially perpendicular to the firstdirection.

The first electrode 110 may serve as a transparent electrode or areflective electrode according to types of the OLED device, for example,a top-emission type or a back-emission type. In the case wherein thefirst electrode 110 serves as the transparent electrode, the firstelectrode 110 may include a transparent conductive material having arelatively high work function such as indium tin oxide (ITO), zinc tinoxide (ZTO), indium oxide (InOx), indium zinc oxide (IZO), zinc oxide(ZnO_(x)), tin oxide (SnO_(x)), gallium zinc oxide (GZO), gallium indiumzinc oxide (GIZO), aluminum-doped zinc oxide (AZO), etc. These may beused alone or in a combination thereof.

In the case wherein the first electrode 110 serves as a reflectiveelectrode, the first electrode 110 may include a metal such as silver(Ag), aluminum (Al), platinum (Pt), gold (Au), chromium (Cr), tungsten(W), molybdenum (Mo), titanium (Ti), palladium (Pd), etc., or an alloyof these metals. In one exemplary embodiment, the first electrode 110may have a multi-stacked structure including a first layer and a secondlayer. The first layer may include, e.g., the above metal or the alloy,and the second layer may include, e.g., the above transparent conductivematerial. In this case, the first electrode 110 may serve as asemi-transparent electrode. In exemplary embodiments, the firstelectrode 110 may serve as an anode providing holes into the firstintermediate layer 130.

The PDL 120 may be disposed on the substrate 100 and the first electrode110. The PDL 120 may partially expose the first electrode 110 so as todefine pixel regions of the OLED device. In exemplary embodiments, thePDL 120 may include a polymer containing a carbon-carbon chain. The PDL120 may serve as an insulator. Thus, the PDL 120 may function as a blackmatrix when the OLED device is a back-emission type.

The first intermediate interlayer 130 may be disposed on the substrate100, the PDL 120 and the exposed first electrode 110. In exemplaryembodiments, the first intermediate layer 130 may include a holetransport layer (HTL). The HTL may include a hole transport material,for example, 4,4′-bisbiphenyl (NPB),N,N′-diphenyl-N,N′-bis(3-methylphenyl)-1,1′-biphenyl-4,4-diamine (TPD),N,N′-di-1-naphtyl-N,N′-diphenyl-1,1′-biphenyl-4,4′-diamine (NPD),N-phenylcarbazole, polyvinylcarbazole, or a mixture of these materials.In one exemplary embodiment, the first intermediate layer 130 mayinclude a hole injection layer (HIL) (not illustrated) beneath the HTL.The HIL may facilitate a hole injection from the first electrode 100 tothe HTL. For example, the HIL may include cupper phthalocyanine (CuPc),poly(3,4)-ethylenedioxythiophene (PEDOT), polyaniline (PANI) or amixture of these materials.

The fluorine-containing layer 140 may be formed on an upper surface ofthe first intermediate layer 130 substantially overlapping an uppersurface of the PDL 120. Hereinafter, the upper surface of the firstintermediate layer 130 on which the fluorine-containing layer 140 isformed may be referred to as a second surface, and a remaining uppersurface of the first intermediate layer 130 on which thefluorine-containing layer 140 is not formed may be referred to as afirst surface. The first surface may substantially overlap the exposedfirst electrode 110. As illustrated in FIG. 1, the fluorine-containinglayer 140 may substantially overlap the upper surface of the PDL 120. Inan exemplary embodiment, the fluorine-containing layer 140 may alsopartially overlap a sidewall of the PDL 120.

In exemplary embodiments, the second surface including thefluorine-containing layer 140 may be hydrophobic. Furthermore, thesecond surface may have surface energy and/or ink-affinity substantiallylower than those of the first surface. The fluorine-containing layer 140may include fluorine atoms, fluorine ions or fluorine-containing ionsthat may be diffused from the PDL 120, and may be fixed at the secondsurface of the first intermediate layer 130. A process for forming thefluorine-containing layer 140 may be described in detail with referenceto FIGS. 27 through 33 that illustrate a method of manufacturing theOLED device in exemplary embodiments.

The EML 150 may be disposed on the first surface of the firstintermediate layer 130. The EML 150 may include at least one of lightemitting materials for generating different colors of light, forexample, a red color of light, a green color of light or a blue color oflight. The EML 150 may include a mixture or a combination of the lightemitting materials for generating a white color of light. The EML 150may further include a fluorescent host material or a phosphorescent hostmaterial having a relatively large band gap.

In exemplary embodiments, the EML 150 may be selectively disposed on thefirst surface on which the fluorine-containing layer 140 is not formed.Thus, the light emitting materials of the EML 150 may be prevented frombeing deposited or diffused onto non-pixel regions substantiallyoverlapping the PDL 120 and from blurring or smearing the non-pixelregions. As a result, the OLED device may have improved luminescentcharacteristics including, e.g., resolution, contrast, etc.

The second intermediate layer 160 may be formed on the firstintermediate layer 130 so as to cover the fluorine-containing layer 140and the EML 150. In exemplary embodiments, the second intermediate layer160 may include an electron transport layer (ETL). The ETL may include,e.g., tris(8-quinolinolato)aluminum (III) (Alq3),2-(4-biphenylyl)-5-4-tert-butylphenyl-1,3,4-oxadiazole (PBD),bis(2-methyl-8-quinolinolato)-4-phenylphenolato-aluminum (BAlq),bathocuproine (BCP), etc. These may be used alone or in a mixturethereof.

In one exemplary embodiment, the second intermediate layer 160 mayfurther include an electron injection layer (EIL) (not illustrated)disposed on the ETL. The EIL may include an alkaline metal, an alkalineearth metal, fluorides of these metals, oxides of these metals, etc.These may be used alone or in a mixture thereof.

The second electrode 170 may be disposed on the second intermediatelayer 160. In the case wherein the second electrode 170 serves as atransparent electrode, the second electrode 170 may include atransparent conductive material such as indium tin oxide, zinc tinoxide, indium oxide, indium zinc oxide, zinc oxide, tin oxide, galliumzinc oxide, gallium indium zinc oxide, aluminum-doped zinc oxide, etc.In the case wherein the second electrode 170 serves as a reflectiveelectrode, the second electrode 170 may include a metal such as silver,aluminum, platinum, gold, chromium, tungsten, molybdenum, titanium,palladium, etc., or an alloy of these metals. In one exemplaryembodiment, the second electrode 170 may have a multi-stacked structureincluding a first layer and a second layer. The first layer may include,e.g., the above metal or the alloy, and the second layer may include,e.g., the above transparent conductive material. The second electrode170 may serve as a cathode providing electrons into the secondintermediate layer 160.

In some exemplary embodiments, a third electrode (not illustrated) maybe further disposed on the second electrode 170 and the substrate 100.The third electrode may be electrically connected to a lead (notillustrated) that may be formed on a peripheral portion of the substrate100 so as to be spaced apart from the first electrode 110. A structureof the third electrode and a method of forming the third electrode willbe described in detail with reference to FIGS. 31 through 33.

A protection layer (not illustrated) and an upper substrate (notillustrated) may be sequentially disposed on the second electrode 170.The protection layer may include a transparent conductive material andthe upper substrate may include a transparent insulating substrate.

FIGS. 2 through 4 are perspective and cross-sectional views illustratingthe organic light emitting display device of FIG. 1. Specifically, FIGS.2 and 4 are perspective views illustrating the OLED devices of FIG. 1 inaccordance with exemplary embodiments. FIG. 3 is a cross-sectional viewtaken along a line of FIG. 2. In FIGS. 2 and 4, the EML 150, the secondintermediate layer 160 and the second electrode 170 of FIG. 1 are notillustrated for convenience of explanation. As illustrated in FIGS. 2through 4, the first intermediate layer 130 may include an HIL 130 a andan HTL 130 b sequentially formed on the substrate 100, the PDL 120 andthe first electrode 110.

Referring to FIGS. 2 and 3, the PDL 120 may have a substantially “H”shape. For example, the PDL 120 may include a first line pattern 120 a(see FIG. 2) and a second line pattern 120 b (see FIG. 3). In exemplaryembodiments, a plurality of the first line patterns 120 a may extend inthe second direction and a plurality of the second line patterns 120 bmay extend in the first direction. The first and second line patterns120 a and 120 b, respectively, may meet each other so as to define pixelregions having lattice or grid structures.

The fluorine-containing layer 140 may include a firstfluorine-containing layer 140 a (FIG. 2) and a secondfluorine-containing layer 140 b (FIG. 3). The first fluorine-containinglayer 140 a may substantially overlap an upper surface of the first linepattern 120 a and the second fluorine-containing layer 140 b maysubstantially overlap an upper surface of the second line pattern 120 b.The first and second fluorine-containing layers 140 a and 140 b,respectively, may also meet each other in a manner substantially thesame as or similar to that of the first and second line patterns 120 aand 120 b, respectively.

As illustrated in FIG. 3, the second line pattern 120 b of the PDL 120may be disposed between the adjacent first electrodes 110 spaced apartfrom each other in the second direction. The second fluorine-containinglayer 140 b may be formed on an upper surface of the first intermediatelayer 130 substantially overlapping the upper surface of the second linepattern 120 b. Accordingly, the EML 150 may be separated in the seconddirection by the second fluorine-containing layer 140 b. Similarly, theEML 150 may be separated in the first direction by the firstfluorine-containing layer 140 a.

In one exemplary embodiment, the fluorine-containing layer 140 may bedisposed only over the first line pattern 120 a. For example, only thefirst fluorine-containing layer 140 a may be formed.

Referring to FIG. 4, the PDL 120 may have a linear shape extending inthe second direction. For example, the PDL 120 may only include thefirst line pattern 120 a illustrated in FIG. 2. The fluorine-containinglayer 140 may be formed on the upper surface of the first intermediatelayer 130 substantially overlapping the upper surface of the PDL 120.

FIG. 5 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with some exemplary embodiments of theinvention. The OLED device of FIG. 5 may have a constructionsubstantially the same as, or similar to, that of the OLED device ofFIG. 1 except for the structure of the first intermediate layer. Thus,like reference numerals refer to like elements and detailed descriptionsthereof are omitted herein.

Referring to FIG. 5, a first intermediate layer 135 may include a firstpattern 131 and a second pattern 133. The first pattern 131 may bedisposed on a first electrode 110 and a sidewall of a PDL 120, and thesecond pattern 133 may be disposed on an upper surface of a PDL 120. Inone exemplary embodiment, the second pattern 133 may extend to a portionof the sidewall of the PDL 120. The first intermediate layer 135 mayserve as an HTL of the OLED device. Additionally, an HIL (not shown) maybe disposed beneath the HTL. In exemplary embodiments, the secondpattern 133 may have an upper surface substantially higher than that ofthe first pattern 131.

In exemplary embodiments, the first pattern 131 may include theabove-mentioned hole transport material. The second pattern 133 mayinclude a cross-linked or polymerized photosensitive material inaddition to the hole transport material. Therefore, the second pattern133 may have an electrical conductivity substantially less than that ofthe first pattern 131 or an electrical resistance substantially greaterthan that of the first pattern 131. Additionally, the second pattern 133may have a surface energy substantially less than that of the firstpattern 131.

The photosensitive material may refer to a material capable of beingcross-linked and/or polymerized by an exposure process. For example, thephotosensitive material may include a negative type photosensitivematerial. The photosensitive material may include, e.g., anacrylate-based material, a methacrylate-based material, an aromaticolefin-based material or a benzene-based material having a vinyl group.For example, the photosensitive material may include 1,4-butanediolacrylate, 1,3-butylene glycol diacrylate, 1,6-hexanediol diacrylate,diethylene glycol diacrylate, ethylene glycol diacrylate, triethyleneglycol diacrylate, polyethylene glycol diacrylate, neopentyl glycoldiacrylate, propylene glycol diacrylate, dipropylene glycol diacrylate,sorbitol triacrylate, bisphenol A diacrylate derivatives,pentaerythritol triacrylate, pentaerythritol tetraacrylate,pentaerythritol diacrylate, dip entaerythritol pentaacrylate, dipentaerythritol hexaacrylate, trimethyl propane ethoxy triacrylate ormethacrylates of these materials. These may be used alone or in amixture thereof.

According to exemplary embodiments, the second pattern 133 may have asurface energy substantially less than that of the first pattern 131 sothat the second pattern 133 may have a relatively low wettability. Thus,an EML 150 may be formed selectively on the first pattern 131 due to thesurface energy difference. Additionally, the second pattern 133 may havea relatively low electrical conductivity or a relatively high electricalresistance so that lateral diffusion of charges may be blocked.Therefore, crosstalk between adjacent pixel regions may be prevented.

In some exemplary embodiments, a third electrode (not illustrated) maybe further disposed on a second electrode 170 and a substrate 100. Thethird electrode may be electrically connected to a lead (notillustrated) that may be formed on a peripheral portion of the substrate100 so as to be spaced apart from the first electrode 110. In someexemplary embodiments, a protection layer (not illustrated) and an uppersubstrate (not illustrated) may be sequentially disposed on the secondelectrode 170.

FIGS. 6 through 14 are perspective and cross-sectional viewsillustrating the organic light emitting display device of FIG. 5

Specifically, FIGS. 6 and 9 are perspective views illustrating the OLEDdevice of FIG. 5 in accordance with exemplary embodiments, FIGS. 7 and 8are cross-sectional views taken along a line VII-VII of FIG. 6, and FIG.10 is a cross-sectional view taken along a line X-X of FIG. 9. Forconvenience of explanation, the EML 150, the second intermediate layer160 and the second electrode 170 of FIG. 5 are not illustrated on FIGS.6 and 9. As illustrated in FIGS. 6 through 10, the first intermediatelayer 135 may include an HIL 135 a and an HTL 135 b sequentially formedon the substrate 100, the PDL 120 and the first electrode 110.

Referring to FIGS. 6 through 8, the PDL 120 may have a substantially “H”shape. For example, the PDL 120 may include a plurality of first linepatterns 120 a (FIG. 6) extending in the second direction and aplurality of second line patterns 120 b (FIG. 7) extending in the firstdirection. The first and second line patterns 120 a and 120 b,respectively, may meet each other so as to define pixel regions havinglattice or grid structures.

The HTL 135 b may include first, second and third patterns 131, 133 and137, respectively. The second pattern 133 may substantially overlap anupper surface of the first line pattern 120 a. A portion of the HTL 135b substantially overlapping an upper surface of the second line pattern120 b may be defined as the third pattern 137. A remaining portion ofthe HTL 135 b, except for the second and third patterns 133 and 137,respectively, may be defined as the first pattern 131. The second andthird patterns 133 and 137, respectively, may also meet each other in amanner substantially the same as or similar to that of the first andsecond line patterns 120 a and 120 b, respectively.

In exemplary embodiments, the third pattern 137 may substantiallyoverlap a portion of the substrate 100 between the adjacent firstelectrodes 110 spaced apart from each other in the second direction. Thesecond and/or third patterns 133 and 137, respectively, may have uppersurfaces substantially higher than that of the first pattern 131.

In exemplary embodiments, the third pattern 137 may have propertiessubstantially the same as, or similar to, those of the second pattern133. For example, the third pattern 137 may include the above-mentionedhole transport material and the above-mentioned cross-linked orpolymerized photosensitive material. Thus, the third pattern 137 mayhave an electrical resistance substantially greater than that of thefirst pattern 131 or an electrical conductivity substantially less thanthat of the first pattern 131. Furthermore, the third pattern 137 mayhave a surface energy substantially less than that of the first pattern131.

As illustrated in FIG. 7, the second line pattern 120 b of the PDL 120may be disposed between the adjacent first electrodes 110 spaced apartfrom each other in the second direction. An EML 150 a may be separatedin the second direction by the third pattern 137. Similarly, the EML 150a may be separated in the first direction by the second pattern 133.

Meanwhile, an EML 150 b may continuously extend on the first pattern 131and the third pattern 137 in the second direction as illustrated in FIG.8.

Referring to FIGS. 9 and 10, the third pattern may not be formed overthe second line pattern 120 b of the PDL 120. In this case, the secondpattern 133 of the HTL 135 b may substantially overlap the upper surfaceof the first line pattern 120 a of the PDL 120, and a remaining portionof the HTL 135 b, except for the second pattern 133, may be defined asthe first pattern 131. As illustrated in FIG. 10, an EML 150 c mayextend on the first pattern 131 in the second direction, and may beseparated in the first direction by the second pattern 133.

FIG. 11 is a perspective view illustrating one exemplary embodiment ofthe OLED device of FIG. 5, and FIG. 12 is a cross-sectional view takenalong a line XII-XII of FIG. 11.

Referring to FIG. 11, PDL 120 may have a linear shape or a bar shapeextending in the second direction. For example, the PDL 120 may onlyinclude the first line pattern 120 a of FIG. 6. An HTL 135 b may includea second pattern 133 substantially overlapping an upper surface of thePDL 120. A remaining portion of the HTL 135 b, except for the secondpattern 133, may be defined as a first pattern 131. In this case, an EML150 d (FIG. 12) may have a linear shape or a bar shape extending on thefirst pattern 131 in the second direction as illustrated in FIG. 12. TheEML 150 d may be separated in the first direction by the second pattern133.

FIG. 13 is a perspective view illustrating one exemplary embodiment ofthe OLED device of FIG. 5, and FIG. 14 is a cross-sectional view takenalong a line XIV-XIV of FIG. 13.

Referring to FIGS. 13 and 14, a PDL 120 may have a linear shape or a barshape extending in the second direction. An HTL 135 b may include first,second and third patterns 131, 133 and 137 a, respectively. The secondpattern 133 (FIG. 13) may substantially overlap an upper surface of thePDL 120 and may have a linear shape extending in the second direction.The third pattern 137 a (FIG. 14) may substantially overlap a portion ofa substrate 100 between adjacent first electrodes 110 spaced apart fromeach other in the second direction. The third pattern 137 a may have alinear shape extending in the first direction. A remaining portion ofthe HTL 135 b, except for the second and third patterns 133 and 137 a,respectively, may be defined as the first pattern 131.

The third pattern 137 a may have an upper surface substantially lowerthan that of the second pattern 133. The upper surface of the thirdpattern 137 a may be substantially coplanar with that of the firstpattern 131. In exemplary embodiments, the third pattern 137 a may haveproperties substantially the same as, or similar to, those of the secondpattern 133. For example, the third pattern 137 a may include theabove-mentioned hole transport material and the above-mentionedcross-linked or polymerized photosensitive material. Thus, the thirdpattern 137 a may have an electrical resistance substantially greaterthan that of the first pattern 131 or an electrical conductivitysubstantially less than that of the first pattern 131. Furthermore, thethird pattern 137 a may have a surface energy substantially less thanthat of the first pattern 131. In this case, an EML 150 e (FIG. 14) mayhave a linear shape extending on the first pattern 131 and the thirdpattern 137 a in the second direction. The EML 150 e may be separated inthe first direction by the second pattern 133.

FIG. 15 is a cross-sectional view illustrating an organic light emittingdisplay device in accordance with some exemplary embodiments. The OLEDdevice of FIG. 15 may have a construction substantially the same as, orsimilar to, that of the OLED device of FIG. 5 except for a structure ofthe first intermediate layer. Thus, like reference numerals refer tolike elements and detailed descriptions thereof are omitted herein.

Referring to FIG. 15, as described with reference to FIG. 5, a firstintermediate layer 136 may include a first pattern 132 and a secondpattern 134. The first pattern 132 may be disposed on a first electrode110 and a sidewall of a PDL 120. The second pattern 134 may be disposedon an upper surface of the PDL 120. In one exemplary embodiment, thesecond pattern 134 may extend to a portion of the sidewall of the PDL120. The first intermediate layer 136 may serve as an HTL of the OLEDdevice. An HIL may be further disposed beneath the HTL.

As described with reference to FIG. 5, the first pattern 132 may includethe above-mentioned hole transport material, and the second pattern 134may include the above-mentioned cross-linked and/or polymerizedphotosensitive material in addition to the hole transport material.

In exemplary embodiments, the first intermediate layer 136 may furtherinclude a fluorine-containing layer 143 formed on the second pattern134. The fluorine-containing layer 143 may include fluorine atoms,fluorine ions or fluorine-containing ions that may be diffused from thePDL 120 and/or the first intermediate layer 136, and may be fixed at anupper surface of the first intermediate layer 136.

The fluorine-containing layer 143 may be hydrophobic. Thefluorine-containing layer 143 may have a relatively low surface energyand a relatively low ink-affinity. Thus, an EML 150 may be disposedselectively on the first pattern 132.

In some exemplary embodiments, a third electrode (not illustrated) maybe further disposed on a second electrode 170 and a substrate 100. Thethird electrode may be electrically connected to a lead (notillustrated) that may be formed on a peripheral portion of the substrate100 so as to be spaced apart from the first electrode 110.

A protection layer (not illustrated) and an upper substrate (notillustrated) may be sequentially disposed on the second electrode 170.

FIGS. 16 through 26 are perspective and cross-sectional viewsillustrating the organic light emitting display devices of FIG. 15.

FIGS. 16, 19, 21, 23 and 25 are perspective views illustrating exemplaryembodiments of the OLED device of FIG. 15. For convenience ofexplanation, the EML 150, the second intermediate layer 160 and thesecond electrode 170 of FIG. 15 are not illustrated in these figures.Furthermore, the first intermediate layer 136 is illustrated to includean HIL 136 a and an HTL 136 b sequentially stacked on the substrate 100,the PDL 120 and the first electrode 110.

FIGS. 17 and 18 are cross-sectional views taken along a line XVII-XVIIof FIG. 16. FIGS. 20, 22, 24 and 26 are cross-sectional views takenalong lines XX-XX, XXII-XXII, XXIV-XXIV and XXVI-XXVI, respectively, ofFIGS. 19, 21, 23 and 25, respectively.

Referring to FIGS. 16 and 17, a PDL 120 may have a substantially “H”shape. For example, the PDL 120 may include a plurality of first linepatterns 120 a (FIG. 16) extending in the second direction and aplurality of second line patterns 120 b (FIG. 17) extending in the firstdirection. The first and second line patterns 120 a and 120 b,respectively, may meet each other to define pixel regions having latticeor grid structures.

The HTL 136 b may include first, second and third patterns 132, 134 and138, respectively. The second pattern 134 (FIG. 16) may substantiallyoverlap an upper surface of the first line pattern 120 a. The thirdpattern 138 (FIG. 17) may substantially overlap an upper surface of thesecond line pattern 120 b. A remaining portion of the HTL 136 b exceptfor the second and third patterns 134 and 138, respectively, may bedefined as the first pattern 132. The second and third patterns 134 and138, respectively, may meet each other in a manner substantially thesame as or similar to that of the first and second line patterns 120 aand 120 b, respectively. The third pattern 138 may substantially overlapa portion of a substrate 100 between adjacent first electrodes 100spaced apart from each other in the second direction. The second andthird patterns 134 and 138, respectively, may have upper surfacessubstantially higher that that of the first pattern 132.

In exemplary embodiments, the third pattern 138 may have propertiessubstantially the same as, or similar to, those of the second pattern134. For example, the third pattern 138 may include the above-mentionedhole transport material and the above-mentioned cross-linked orpolymerized photosensitive material. Thus, the third pattern 138 mayhave an electrical resistance substantially greater than that of thefirst pattern 132 or an electrical conductivity substantially less thanthat of the first pattern 132. Furthermore, the third pattern 138 mayhave a surface energy substantially less than that of the first pattern132.

A fluorine-containing layer 143 (FIG. 16) may include a firstfluorine-containing layer 143 a and a second fluorine-containing layer143 b. The first fluorine-containing layer 143 a may be disposed on thesecond pattern 134, and the second fluorine-containing layer 143 b maybe disposed on the third pattern 138. The first and secondfluorine-containing layers 143 a and 143 b, respectively, may meet eachother in a manner substantially the same as, or similar to, that of thefirst and second line patterns 120 a and 120 b, respectively. The firstfluorine-containing layer 143 a may include fluorine atoms, fluorineions or fluorine-containing ions that may be diffused from the firstline pattern 120 a and/or the second pattern 134. The secondfluorine-containing layer 143 b may include fluorine atoms, fluorineions or fluorine-containing ions that may be diffused from the secondline pattern 120 b and/or the third pattern 138.

As illustrated in FIG. 17, an EML 150 f may be disposed on the firstpattern 132, and may be separated in the second direction by the secondfluorine-containing layer 143 b. The EML 150 f may be separated in thefirst direction by the first fluorine-containing layer 143 a. Inexemplary embodiments, the EML 150 f may have an island shape confinedby the first and second fluorine-containing layers 143 a and 143 b,respectively, that may have hydrophobicity, a relatively lowink-affinity, a relatively low surface energy, etc.

As illustrated in FIG. 18, an EML 150 g may continuously extend on thefirst pattern 132 and the second fluorine-containing layer 143 b in thesecond direction. In this case, the EML 150 g may be separated in thefirst direction by the first fluorine-containing layer 143 a.

Referring to FIGS. 19 and 20, the third pattern 138 and the secondfluorine-containing layer 143 b (of FIG. 18) may not be formed on thesecond line pattern 120 b (FIG. 20) of the PDL 120. In this case, asecond pattern 134 (FIG. 19) may substantially overlap the upper surfaceof the first line pattern 120 a, and a remaining portion of the HTL 136b, except for the second pattern 134, may be defined as a first pattern132. A fluorine-containing layer 143 may be disposed on the secondpattern 134, and may have a line shape or a bar shape extending in thefirst direction. In this case, an EML 150 h (FIG. 20) may continuouslyextend on the first pattern 132 in the second direction. The EML 150 hmay be separated in the first direction by the fluorine-containing layer143.

Referring to FIGS. 21 and 22, a PDL 120 may have a linear shape or a barshape extending in the second direction. The HTL 136 b may include afirst pattern 132, a second pattern 134 and a fluorine-containing layer143. The second pattern 134 may substantially overlap an upper surfaceof the PDL 120. The fluorine-containing layer 143 may be disposed on thesecond pattern 134. A remaining portion of the HTL 136 b, except for thesecond pattern 134 and the fluorine-containing layer 143, may be definedas the first pattern 132. As illustrated in FIG. 22, an EML 150 i mayhave a linear shape extending on the first pattern 132 in the seconddirection. The EML 150 i may be separated in the first direction by thefluorine-containing layer 143.

Referring to FIGS. 23 and 24, a PDL 120 may have a linear shape or a barshape extending in the second direction as illustrated in FIG. 21. TheHTL 136 b may include first, second and third patterns 132, 134 and 138a, respectively. The second pattern 134 may substantially overlap anupper surface of the PDL 120, and have a linear shape extending in thesecond direction. A fluorine-containing layer 143 may be disposed on thesecond pattern 134. The third pattern 138 a may have a linear shapeextending in the first direction. The third pattern 138 a maysubstantially overlap a portion of a substrate 100 between adjacentfirst electrodes 110 spaced apart from each other in the seconddirection. A remaining portion of the HTL 136 b, except for the secondpattern 134, the third pattern 138 a and the fluorine-containing layer143, may be defined as the first pattern 132.

The third pattern 138 a may have an upper surface substantially lowerthan that of the second pattern 134. The upper surface of the thirdpattern 138 a may be substantially coplanar with that of the firstpattern 132. In exemplary embodiments, the third pattern 138 a may haveproperties substantially the same as, or similar to, those of the secondpattern 134. For example, the third pattern 138 a may include theabove-mentioned hole transport material and the above-mentionedcross-linked or polymerized photosensitive material. Thus, the thirdpattern 138 a may have an electrical resistance substantially greaterthan that of the first pattern 132 or an electrical conductivitysubstantially less than that of the first pattern 132. Furthermore, thethird pattern 138 a may have a surface energy substantially less thanthat of the first pattern 132. In this case, an EML 150 j (FIG. 24) mayhave a linear shape extending on the first pattern 132 and the thirdpattern 138 a in the second direction. The EML 150 j may be separated inthe first direction by the fluorine-containing layer 143.

Referring to FIGS. 25 and 26, the OLED device of FIG. 25 may have aconstruction substantially the same as, or similar to, that of FIG. 23except for the shape of the fluorine-containing layer. Specifically, afluorine-containing layer 143 may include a first fluorine-containinglayer 143 a extending in the second direction on a second pattern 134,and a second fluorine-containing layer 143 c extending in the firstdirection on a third pattern 138 a.

In exemplary embodiments, the first fluorine-containing layer 143 a mayinclude fluorine atoms, fluorine ions or fluorine-containing ions thatmay be diffused from a PDL 120 and/or an HTL 136 b. The secondfluorine-containing layer 143 c may include fluorine atoms, fluorineions or fluorine-containing ions that may be diffused from the HTL 136b. In this case, an EML 150 k (FIG. 26) may have a linear shapeextending on a first pattern 132 and the second fluorine-containinglayer 143 c along the second direction.

Hereinafter, methods of manufacturing the OLED devices illustrated withreference to FIGS. 1 through 26 will be described.

FIGS. 27 through 33 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith exemplary embodiments of the invention. Specifically, FIGS. 27through 33 illustrate a method of manufacturing the OLED device of FIGS.1 through 4.

Referring to FIG. 27, a first electrode 110 may be formed on a substrate100, and a preliminary PDL 115 partially exposing the first electrode110 may be formed on the substrate 100.

The substrate 100 may include a lower substrate (not illustrated) andlower structures (not illustrated) formed on the lower substrate. Thelower structures may include, e.g., a switching device, an insulationlayer covering the switching device, etc.

The switching device may include a TFT having a semiconductor layer, agate insulation layer, a gate electrode, a source electrode and a drainelectrode, etc. Alternatively, the switching device may include an oxidesemiconductor device having a gate electrode, a gate insulation layerand an active layer of a semiconductor oxide.

The first electrode 110 may be formed using a transparent conductivematerial such as indium tin oxide (ITO), zinc tin oxide (ZTO), indiumoxide (InOx), indium zinc oxide (IZO), zinc oxide (ZnO_(x)), tin oxide(SnO_(x)), gallium zinc oxide (GZO), gallium indium zinc oxide (GIZO),aluminum-doped zinc oxide (AZO), etc., or the first electrode 110 may beformed using a metal such as silver (Ag), aluminum (Al), platinum (Pt),gold (Au), chromium (Cr), tungsten (W), molybdenum (Mo), titanium (Ti),palladium (Pd), neodymium (Nd), etc., and/or an alloy of these metals.The first electrode 110 may be obtained by a sputtering process, achemical vapor deposition (CVD) process, an atomic layer deposition(ALD) process, a pulse laser deposition (PLD) process, a vacuumevaporation process, a printing process, etc. In some exemplaryembodiments, the first electrode 110 may have a multi-stacked structureincluding a transparent conductive layer and a metal layer.

In exemplary embodiments, a plurality of the first electrodes 110 may beformed so as to be spaced apart from each other in a first direction.Additionally, a plurality of the first electrodes 110 may be formed soas to be spaced apart from each other in a second directionsubstantially perpendicular to the first direction. The first electrode110 may be electrically connected to the drain electrode of theswitching device.

The preliminary PDL 115 may be formed using molecules containingcarbon-fluorine bonds (hereinafter, referred to as a carbon-fluorinecombined molecule). The carbon-fluorine combined molecule may include aCF₁ molecule in which one carbon atom is combined with one fluorineatom, a CF₂ molecule in which one carbon atom is combined with twofluorine atoms, a CF₃ molecule in which one carbon atom is combined withthree fluorine atoms, a CF₄ molecule in which one carbon atom iscombined with four fluorine atoms, etc. Examples of the CF₁, CF₂, CF₃and CF₄ molecules may include CH₃F, CH₂F₂, CHF₃, CF₄, respectively.These may be used alone or in a mixture thereof.

In exemplary embodiments, a carbon-fluorine containing layer (notillustrated) may be formed on the substrate 100 and the first electrode100 using the carbon-fluorine combined molecule by, e.g., a plasmaenhanced chemical vapor deposition (PECVD) process. The carbon-fluorinecontaining layer may be patterned by, e.g., an etching process so as toform the preliminary PDL 115. The carbon-fluorine containing layer mayinclude a polymer in which fluorine atoms are combined with acarbon-carbon backbone.

In exemplary embodiments, the preliminary PDL 115 may be patterned so asto have a substantially “H” shape. For example, the preliminary PDL 115may include a plurality of first line patterns (not illustrated)extending in the second direction and a plurality of second linepatterns (not illustrated) extending in the first direction. In thiscase, the first and second line patterns may cross each other.Alternatively, the preliminary PDL 115 may have a linear shape or a barshape extending in the second direction.

Referring to FIG. 28, a first intermediate layer 130 covering thepreliminary PDL 115 and the first electrode 110 may be formed on thesubstrate 100. In exemplary embodiments, the first intermediate layer130 may include a HIL 130 a and a HTL 130 b sequentially stacked on thesubstrate 100, the preliminary PDL 115 and the first electrode 110.

The HIL 130 a may be formed using a hole injection material, e.g., CuPc,PEDOT, PANI, etc. The HTL 130 b may be formed using a hole transportmaterial, e.g., NPB, TPD, NPD, N-phenylcarbazole, polyvinylcarbazole,etc. The HIL 130 a and the HTL 130 b may be coated or wholesurface-deposited on the substrate 100, the preliminary PDL 115 and thefirst electrode 110 by a spin coating process, a roll coating process, avacuum evaporation process, a thermal evaporation process, etc.

Referring to FIG. 29, an exposure process using, e.g., an ultravioletlight source may be performed selectively on a region substantiallyoverlapping an upper surface of the preliminary PDL 115. Accordingly, afluorine-containing layer 140 may be formed at an upper surface of theHTL 130 b substantially overlapping the upper surface of the preliminaryPDL 115, and the preliminary PDL 115 may be transformed into a PDL 120.

In exemplary embodiments, the ultraviolet light source may emit anultraviolet light having a wavelength in a range of about 180 nm toabout 260 nm. During the exposure process, fluorine atoms, fluorine ionsand/or fluorine-containing ions may be separated or detached from thecarbon-carbon backbone included in the preliminary PDL 115 so as to bediffused to an upper portion of the first intermediate layer 130substantially overlapping the upper surface of the preliminary PDL 115.The diffused fluorine atoms, the fluorine ions and/or thefluorine-containing ions may be fixed at the upper surface of the HTL130 b by the ultraviolet light so as to form the fluorine-containinglayer 140. The preliminary PDL 115 from which the fluorine atoms, thefluorine ions and/or the fluorine-containing ions are removed may betransformed into the PDL 120. In exemplary embodiments, the PDL 120 mayinclude a polymer having repetitive carbon-carbon chains. Accordingly,the PDL 120 may serve as an insulator. In the case wherein the OLEDdevice is operated according to a back-emission type, the PDL 120 mayfunction as a black matrix.

In exemplary embodiments, the fluorine-containing layer 140 maysubstantially overlap an upper surface of the PDL 120. In some exemplaryembodiments, the fluorine-containing layer 140 may partially overlap asidewall of the PDL 120.

The fluorine atoms, the fluorine ions and/or the fluorine-containingions separated from the preliminary PDL 115 may be diffused laterallythrough a sidewall of the preliminary PDL 115 to a portion of the firstintermediate layer 130 substantially overlapping the first electrode110. However, these laterally diffused fluorine atoms, the fluorine ionsand/or the fluorine-containing ions may not be fixed by the ultravioletlight so that they are removed by evaporation. In one exemplaryembodiment, a thermal treatment may be further performed to remove thelaterally diffused fluorine atoms, the fluorine ions and/or thefluorine-containing ions.

Referring now to FIGS. 2 and 3, the PDL 120 may have a substantially “H”shape. For example, the PDL 120 may include a plurality of first linepatterns 120 a (FIG. 2) extending in the second direction and aplurality of second line patterns 120 b (FIG. 3) extending in the firstdirection. The first and second line patterns 120 a and 120 b,respectively, may meet each other to define pixel regions having latticeor grid structures.

In this case, the exposure process may be carried out by a maskincluding an “H”-shaped transparent portion that may substantiallyoverlap an upper surface of the PDL 120. Accordingly, a firstfluorine-containing layer 140 a (FIG. 2) may be formed on a portion ofthe upper surface of the HTL 130 b substantially overlapping the firstline pattern 120 a, and a second fluorine-containing layer 140 b (FIGS.2 and 3) may be formed on a portion of the upper surface of the HTL 130b substantially overlapping the second line pattern 120 b. The first andsecond fluorine-containing layers 140 a and 140 b, respectively, maymeet each other in a manner substantially the same as, or similar to,that of the first and second line patterns 120 a and 120 b,respectively. Hereinafter, a portion of the upper surface of the HTL 130b not including the fluorine-containing layer is referred to as a firstsurface. A portion of the upper surface of the HTL 130 b including thefirst fluorine-containing layer 140 a is referred to as a secondsurface. A portion of the upper surface of the HTL 130 b including thesecond fluorine-containing layer 140 b is referred to as a thirdsurface. In exemplary embodiments, the second and third surfaces may behydrophobic with respect to the first pattern. Additionally, the secondand third surfaces may have ink-affinities substantially less than thatof the first surface.

In some exemplary embodiments, the exposure process may be carried outby a mask including a line-shaped transparent portion substantiallyoverlapping an upper surface of the first line pattern 120 a. In thiscase, the fluorine-containing layer 140 may be formed only over thefirst line pattern 120 a. For example, the second fluorine-containinglayer 140 b of FIG. 2 may not be formed. An upper surface of the HTL 130b may be divided into a second surface including the fluorine-containinglayer 140 and a first surface not including the fluorine-containinglayer 140.

Referring now to FIG. 4, the PDL 120 may have a linear shapesubstantially extending in the second direction. The exposure processmay be carried out by a mask including a line-shaped transparent portionsubstantially overlapping an upper surface of the PDL 120. Accordingly,the fluorine-containing layer 140 may be formed on a portion of an uppersurface of the HTL 130 b substantially overlapping the upper surface ofthe PDL 120. In this case, the upper surface of the HTL 130 b may bedivided into a second surface including the fluorine-containing layer140 and a first surface not including the fluorine-containing layer 140.

Referring to FIG. 30, an EML 150 may be formed on a portion of the HTL130 b not including the fluorine-containing layer 140. The EML 150 maybe formed using at least one of light emitting materials for generatingdifferent colors of light, for example, a red color of light, a greencolor of light and/or a blue color of light. The EML 150 may be formedusing a mixture or a combination of the light emitting materials forgenerating a white color of light. In one exemplary embodiment, thelight emitting materials may serve as dopant materials of the EML 150.In this case, the EML 150 may further include a host material having arelatively large band gap. Suitable dopant and host materials may beselected in accordance with a light-emitting mechanism of the EML 150,for example, a fluorescent mechanism or a phosphorescent mechanism. TheEML 150 may be obtained by a nozzle printing process, an inkjet printingprocess, a transfer process through heat or laser, etc.

Referring now to FIGS. 2 and 3, the EML 150 may be formed by, e.g., aninkjet printing process. In this case, the second and third surfaces,including the fluorine-containing layers 140 a and 140 b, may haverelatively low ink-affinities so that the EML 150 may be formedselectively on the first surface not including the fluorine-containinglayer. Furthermore, the first surface may be substantially lower thanthe second and third surfaces so that the EML 150 may be formedselectively on the first surface by gravity. Therefore, blurring orsmearing of ink onto a non-pixel region may be prevented so that theOLED device may have improved resolution or contrast.

Meanwhile, in the case wherein the fluorine-containing layer is notformed over the second line pattern 120 b, the EML 150 may be formed by,e.g., a nozzle printing process. In this case, the EML 150 may be formedon the first surface not including the first fluorine-containing layer140 so as to extend in the second direction.

As illustrate in FIG. 4, in the case wherein the PDL may have asubstantially linear shape extending in the second direction, the EML150 may be formed by, e.g., a nozzle printing process. In this case, theEML 150 may be formed on the first surface not including the firstfluorine-containing layer 140 so as to extend in the second direction.

Referring now to FIG. 30, a second intermediate layer 160 may be formedon the HTL 130 b, the EML 150 and the fluorine-containing layer 140. Thesecond intermediate layer 160 may be obtained by a vacuum depositionprocess, a thermal evaporation process, a slit coating process, a spincoating process, a printing process, etc.

The second intermediate layer 160 may include an ETL. The ETL may beformed using, e.g., Alq₃, PBD, BAlq, BCP, etc. These may be used aloneor in a mixture thereof. The second intermediate layer 160 may furtherinclude an EIL formed on the ETL. The EIL may be formed using, e.g., analkaline metal, an alkaline earth metal, fluorides of these metals,oxides of these metals, etc.

A second electrode 170 may be formed on the second intermediate layer160. The second electrode 170 may be formed using a transparentconductive material such as indium tin oxide, zinc tin oxide, indiumoxide, indium zinc oxide, zinc oxide, tin oxide, gallium zinc oxide,gallium indium zinc oxide, aluminum-doped zinc oxide, etc., or thesecond electrode 170 may be formed using a metal such as silver,aluminum, platinum, gold, chromium, tungsten, molybdenum, titanium,palladium, neodymium, etc., and/or an alloy of these metals. The secondelectrode 110 may be obtained by a sputtering process, a CVD process, anALD process, a PLD process, a vacuum evaporation process, a printingprocess, etc. In some exemplary embodiments, the second electrode 170may have a multi-stacked structure including a transparent conductivelayer and a metal layer. The second electrode 170 may serve as a cathodeproviding electrons into the second intermediate layer 160.

A protection layer (not illustrated) and an upper substrate (notillustrated) may be formed on the second electrode 170 so as to obtainthe OLED device according to exemplary embodiments. In some exemplaryembodiments, a third electrode electrically connected to a lead formedon a peripheral portion of the substrate 100 may be further formed onthe second electrode 170.

Referring to FIG. 31, a lead 180 spaced apart from the first electrode110 and the PDL 120 may be formed on a peripheral portion of thesubstrate 100. The lead 180 may be electrically connected to a wiring(not illustrated) formed in the substrate 100.

In exemplary embodiments, the lead 180 may be formed simultaneously withthe first electrode 110 during an etching process for forming the firstelectrode 110. The second electrode 170 may be formed on the secondintermediate layer 160 so as to substantially overlap the firstelectrode 110 and so as not to substantially overlap the lead 180.

Referring to FIG. 32, the second intermediate layer 160, thefluorine-containing layer 140, the first intermediate layer 130 and thePDL 120 may be sequentially etched using the second electrode 170 as anetching mask. Accordingly, the lead 180 on the substrate 100 may beexposed. Additionally, an insulation layer pattern 185 including theetched second intermediate layer 160, the fluorine-containing layer 140,the first intermediate layer 130 and the PDL 120 may be formed. Inexemplary embodiments, the etching process may include a dry etchingprocess using, e.g., oxygen (O₂) plasma.

Referring to FIG. 33, a third electrode 190 may be formed on thesubstrate 100, an etched surface of the insulation layer pattern 185 andthe second electrode 180. The third electrode 190 may be formed using amaterial substantially the same as, or similar to, that of the secondelectrode 170. The third electrode 190 may be obtained by a sputteringprocess, a CVD process, an ALD process, a vacuum deposition process, aPLD process, a printing process, etc. The third electrode 190 may alsoserve as a cathode and may be electrically connected to the lead 180 onthe substrate 100. The insulation layer pattern 185 may intervenebetween the first electrode 110 and the third electrode 190. Thus, ashort-circuit between the first electrode 110 and the third electrode190 may be prevented.

FIGS. 34 through 36 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith some exemplary embodiments of the invention. For example, FIGS. 34through 36 illustrate a method of manufacturing the OLED devices ofFIGS. 5 through 14. Detailed descriptions on processes substantially thesame as, or similar to, those illustrated with reference to FIGS. 27through 33 are omitted.

Referring to FIG. 34, a first electrode 110 may be formed on a substrate100, and a PDL 120 partially exposing the first electrode 110 may beformed on the substrate 100. A first intermediate layer 135 covering thePDL 120 and the first electrode 110 may be formed on the substrate 100.In exemplary embodiments, the first intermediate layer 135 may includean HIL 135 a and an HTL 135 b sequentially stacked on the substrate 100,the PDL 120 and the first electrode 110.

The PDL 120 may be formed using a photosensitive material such asacryl-based resin, polyimide, benzocyclobutene, etc. For example, thephotosensitive material may be deposited on the substrate 100 and thefirst electrode 110, and then exposure and developing processes may beperformed to form the PDL 120. In exemplary embodiments, the PDL 120 mayhave a substantially “H”-shape as illustrated in FIGS. 6 through 10. Forexample, the PDL 120 may include a plurality of first line patterns 120a extending in the second direction and a plurality of second linepatterns 120 b extending in the first direction. In this case, the firstand second line patterns 120 a and 120 b, respectively, may cross eachother. Alternatively, the PDL 120 may have a linear shape or a bar shapeextending in the second direction as illustrated in FIGS. 11 through 14.

Referring now to FIG. 34, the HTL 135 b may be formed using aphotosensitive composition that may include the above-mentioned holetransport material and the above-mentioned photosensitive material. Inexemplary embodiments, the photosensitive composition may furtherinclude a photoinitiator. The photoinitiator may be a compound that mayproduce active species initiating cross-linking and/or polymerizationreactions of the photosensitive material during an exposure process.Examples of the photoinitiator may include acetophenon derivatives,benzophenon derivatives, triazine derivatives, biimidazole-based oroxime ester-based materials, etc. These may be used alone or in amixture thereof.

Referring to FIG. 35, an exposure process using, e.g., an ultravioletlight source may be performed selectively on a region substantiallyoverlapping an upper surface of the PDL 120. Accordingly, the HTL 135 bmay be transformed into a first pattern 131 and a second pattern 133. Inexemplary embodiments, a portion of the HTL 135 b substantiallyoverlapping the upper surface of the PDL 120 may be transformed into thesecond pattern 133. A remaining portion of the HTL 135 b that may not betransformed into the second pattern 133 may be defined as the firstpattern 131.

In exemplary embodiments, the cross-liking and/or polymerizationreactions of the photosensitive material may be induced at the portionof the HTL 135 b selectively exposed to light. Thus, the second pattern133 may include a cross-linked and/or polymerized photosensitivematerial in addition to the hole transport material. Accordingly, thesecond pattern 133 may have an electrical conductivity substantiallylesser than that of the first pattern 131 or an electrical resistancesubstantially greater than that of the first pattern 131. Additionally,the second pattern 133 may have a surface energy substantially less thanthat of the first pattern 131. Therefore, an EML 150 may be formedselectively on the first pattern 131 by a subsequent process, andlateral diffusion of charges may be blocked by the second pattern 133 tothereby prevent crosstalk between adjacent pixel regions.

In exemplary embodiments, a thermal treatment may be additionallyperformed so that the photosensitive material and/or the photoinitiatorremaining in the first pattern 131 may be removed by evaporation.

Referring now to FIG. 6, the PDL 120 may have a substantially “H” shape.In this case, the exposure process may be carried out by a maskincluding an “H”-shaped transparent portion that may substantiallyoverlap the upper surface of the PDL 120. Accordingly, a portion of theHTL 135 b substantially overlapping an upper surface of the first linepattern 120 a may be transformed into the second pattern 133, and aportion of the HTL 135 b substantially overlapping an upper surface ofthe second line pattern 120 b (FIG. 7) may be transformed into a thirdpattern 137. The second and third line patterns 133 and 137,respectively, may cross each other in a manner substantially the sameas, or similar to, that of the first and second line patterns 120 a and120 b, respectively. In exemplary embodiments, the third pattern 137 mayhave electrical and surface properties substantially the same as, orsimilar to, those of the second pattern 133. The second and thirdpatterns 133 and 137, respectively, may have upper surfacessubstantially higher than that of the first pattern 131.

Referring now to FIG. 9, the exposure process may be carried out by amask including a line-shaped transparent portion substantiallyoverlapping the upper surface of the first line pattern 120 a. In thiscase, the third pattern 137 illustrated in FIG. 6 may not be formed. Forexample, the second pattern 133 substantially overlapping the uppersurface of the first line pattern 120 a may be formed. A remainingportion of the HTL 135 b, except for the second pattern 133, may bedefined as the first pattern 131.

Referring now to FIG. 11, the PDL 120 may have a linear-shape or a barshape extending in the second direction. In this case, the exposureprocess may be carried out by a mask including a line-shaped transparentportion substantially overlapping the upper surface of the PDL 120.Accordingly, a portion of the HTL 135 b substantially overlapping theupper surface of the PDL 120 may be transformed into the second pattern133. A remaining portion of the HTL 135 b, except for the second pattern133, may be defined as the first pattern 131.

Referring now to FIG. 13, the PDL 120 may have a linear-shape or a barshape extending in the second direction as illustrated in FIG. 13.Meanwhile, the exposure process may be carried out by a mask includingan “H”-shaped transparent portion. In this case, a portion of the HTL135 b substantially overlapping the upper surface of the PDL 120 may betransformed into the second pattern 133. A portion of the HTL 135 bsubstantially overlapping a portion of the substrate 100 between theadjacent first electrodes 110 spaced apart from each other in the seconddirection may be transformed into a third pattern 137 a. A remainingportion of the HTL 135 b, except for the second and third patterns 133and 137 a, respectively, may be defined as the first pattern 131. Anupper surface of the third pattern 137 a may be substantially lower thanthat of the second pattern 133, and may be coplanar with that of thefirst pattern 131. In exemplary embodiments, the third pattern 137 a mayhave electrical and surface properties substantially the same as, orsimilar to, those of the second pattern 133.

Referring to FIG. 36, the EML 150 may be formed on the first pattern131. The EML 150 may be formed by an inkjet printing process, a nozzleprinting process, a transfer process using heat or laser, etc.

Referring now to FIGS. 6 and 7, an EML 150 a may be formed by, e.g., aninkjet printing process. The second and third patterns 133 and 137,respectively, may have surface energy and wettability substantially lessthan those of the first pattern 131. Additionally, the second and thirdpatterns 133 and 137, respectively, may have upper surfacessubstantially higher than that of the first pattern 131. Thus, the EML150 a may be formed selectively on the first pattern 131 by theabove-mentioned surface properties and gravity as illustrated in FIG. 7.Therefore, blurring or smearing of ink onto non-pixel regions may beprevented so that the OLED device may have improved resolution orcontrast.

Referring now to FIG. 8, an EML 150 b may be formed by, e.g., a nozzleprinting process. In this case, the EML 150 b may be formed on the firstpattern 131 and the third pattern 137 so as to continuously extend inthe second direction.

Referring now to FIGS. 9 and 10, an EML 150 c may be formed by, e.g., anozzle printing process. In this case, the EML 150 c may have a linearshape extending on the first pattern 131 in the second direction.

Referring now to FIGS. 11 and 12, an EML 150 d may be formed by, e.g., anozzle printing process. In this case, the EML 150 d may have a linearshape extending on the first pattern 131 in the second direction.

Referring now to FIGS. 13 and 14, an EML 150 e may be formed by, e.g., anozzle printing process. In this case, the EML 150 e may have a linearshape extending on the first pattern 131 and the third pattern 137 a inthe second direction.

Referring now to FIG. 36, a second intermediate layer 160 may be formedon the HTL 135 b and the EML 150, and then a second electrode 170 may beformed on the second intermediate layer 170. Furthermore, a protectionlayer (not illustrated) and an upper substrate (not illustrated) may beformed on the second electrode 170 so as to obtain the OLED deviceaccording to exemplary embodiments.

In some exemplary embodiments, a third electrode electrically connectedto a lead on a peripheral portion of the substrate 100 may be furtherformed on the second electrode 170 by processes substantially the sameas, or similar to, those illustrated with reference to FIGS. 31 through33.

FIGS. 37 through 39 are cross-sectional views illustrating a method ofmanufacturing an organic light emitting display device in accordancewith some exemplary embodiments of the invention. For example, FIGS. 37through 39 illustrate a method of manufacturing the OLED devices ofFIGS. 15 through 26. Detailed descriptions of processes substantiallythe same as, or similar to, those illustrated with reference to FIGS. 27through 33 are omitted.

Referring to FIG. 37, a first electrode 110 may be formed on a substrate100, and a PDL 120 partially exposing the first electrode 110 may beformed on the substrate 100. A first intermediate layer 136 covering thePDL 120 and the first electrode 110 may be formed on the substrate 100.In exemplary embodiments, the first intermediate layer 136 may includean HIL 136 a and an HTL 136 b sequentially stacked on the substrate 100,the PDL 120 and the first electrode 110.

The PDL 120 may be formed using a photosensitive material such asacryl-based resin, polyimide, benzocyclobutene, etc. For example, thephotosensitive material may be deposited on the substrate 100 and thefirst electrode 110, and then exposure and developing processes may beperformed to form the PDL 120. Alternatively, a carbon-fluorinecontaining layer may be formed on the substrate 100 and the firstelectrode 110 using the above-mentioned carbon-fluorine combinedmolecules by, e.g., a PECVD process. The carbon-fluorine containinglayer may be patterned by, e.g., an etching process to form the PDL 120.The PDL 120 may include a plurality of first line patterns 120 aextending in the second direction and a plurality of second linepatterns 120 b extending in the first direction as illustrated in FIGS.16 through 19. In this case, the first and second line patterns 120 aand 120 b, respectively, may cross each other. Alternatively, the PDL120 may have a linear shape or a bar shape extending in the seconddirection as illustrated in FIGS. 21 through 26.

Referring now to FIG. 37, the HTL 136 b may be formed using aphotosensitive composition that may include the above-mentioned holetransport material and the above-mentioned photosensitive material. Thephotosensitive composition may further include the above-mentionedphotoinitiator. In exemplary embodiments, the photosensitive compositionmay further include the above-mentioned carbon-fluorine combinedmolecules. In some exemplary embodiments, at least one of the PDL 120and the HTL 136 b may include the carbon-fluorine combined molecules.

Referring to FIG. 38, an exposure process using, e.g., an ultravioletlight source may be performed selectively on a region that maysubstantially overlap an upper surface of the PDL 120 so that the HTL136 b may be divided into a first pattern 132 and a second pattern 134.In exemplary embodiments, a portion of the HTL 136 b substantiallyoverlapping the upper surface of the PDL 120 may be transformed into thesecond pattern 134. A remaining portion of the HTL 136 b, except for thesecond pattern, may be defined as the first pattern 132. The secondpattern 134 may include a cross-linked and/or polymerized photosensitivematerial.

A fluorine-containing layer 143 may be formed on the second pattern 134.During the exposure process, fluorine atoms, fluorine ions and/orfluorine-containing ions may be separated or detached from carbon atomsincluded in the PDL 120 and/or the HTL 136 b so as to be diffused intoan upper portion of the HTL 136 b. The diffused fluorine atoms, fluorineions and/or fluorine-containing ions may be fixed to an upper surface ofthe second pattern 134 by an ultraviolet light to form thefluorine-containing layer 143. In the case wherein the PDL 120 includesthe carbon-fluorine combined molecules, the PDL 120 from which thefluorine atoms are removed may include a polymer containing repetitivecarbon-carbon bonds. Accordingly, the PDL 120 may serve as an insulator.In this case, the PDL 120 may function as a black matrix when the OLEDdevice is operated by a back-emission mode.

In exemplary embodiments, the fluorine-containing layer 143 maysubstantially overlap the upper surface of the PDL 120. In someexemplary embodiments, the fluorine-containing layer 143 may partiallyoverlap a sidewall of the PDL 120.

The fluorine atoms, fluorine ions and/or fluorine-containing ions may belaterally diffused into the first pattern 132. However, these laterallydiffused fluorine atoms, fluorine ions and/or fluorine-containing ionsmay not be fixed by the ultraviolet light, and may thereby be removed byevaporation. In one exemplary embodiment, a thermal treatment forvaporizing the fluorine atoms, fluorine ions and/or fluorine-containingions diffused into the first pattern 132 may be further performed.

Referring now to FIGS. 16 through 18, the PDL 120 may have asubstantially “H” shape. In this case, the exposure process may becarried out by a mask including an “H”-shaped transparent portion thatmay substantially overlap upper surfaces of the first and second linepatterns 120 a and 120 b, respectively, of the PDL 120. Accordingly, aportion of the HTL 136 b substantially overlapping the upper surface ofthe first line pattern 120 a may be transformed into the second pattern134, and a portion of the HTL 136 b substantially overlapping the uppersurface of the second line pattern 120 b may be transformed into a thirdpattern 138. A remaining portion of the HTL 136 b, except for the secondand third patterns 134 and 138, respectively, may be defined as thefirst pattern 132. The second and third patterns 134 and 138,respectively, may cross each other in a manner substantially the sameas, or similar to, that of the first and second line patterns 120 a and120 b, respectively. In exemplary embodiments, the third pattern 138 mayhave electrical and surface properties substantially the same as, orsimilar to, those of the second pattern 134. Additionally, the secondand third patterns 134 and 138, respectively, may have upper surfacessubstantially higher than that of the first pattern 132.

First and second fluorine-containing layers 143 a and 143 b,respectively, may be formed on the second and third patterns 134 and138, respectively. The first fluorine-containing layer 143 a may includethe fluorine atoms, fluorine ions and/or fluorine-containing ionsdiffused from the first line pattern 120 a and/or second pattern 134.The second fluorine-containing layer 143 b may include the fluorineatoms, fluorine ions and/or fluorine-containing ions diffused from thesecond line pattern 120 b and/or the third pattern 138.

Referring now to FIGS. 19 and 20, the exposure process may be carriedout by a mask including a line-shaped transparent portion substantiallyoverlapping the upper surface of the first line pattern 120 a.Accordingly, a portion of the HTL 136 b substantially overlapping theupper surface of the first line pattern 120 a may be transformed intothe second pattern 134. A remaining portion of the HTL 136 b, except forthe second pattern 134, may be defined as the first pattern 132. In thiscase, the third pattern 138 illustrated in FIGS. 16 through 18 may notbe formed. The fluorine-containing layer 143, including the fluorineatoms, fluorine ions and/or fluorine-containing ions diffused from thefirst line pattern 120 a and/or the second pattern 134, may be formed onthe second pattern 134.

Referring now to FIGS. 21 and 22, the PDL 120 may have a linear shapeextending in the second direction, and the exposure process may becarried out by a mask including a line-shaped transparent portionsubstantially overlapping the upper surface of the PDL 120. Accordingly,a portion of the HTL 136 b substantially overlapping the upper surfaceof the PDL 120 may be transformed into the second pattern 134. Aremaining portion of the HTL 136 b, except for the second pattern 134,may be defined as the first pattern 132. The fluorine-containing layer143, including the fluorine atoms, fluorine ions and/orfluorine-containing ions diffused from the PDL 120 and/or the secondpattern 134, may be formed on the second pattern 134.

Referring now to FIGS. 23 and 24, the PDL 120 may have a linear shapeextending in the second direction, and the exposure process may becarried out by a mask including a substantially “H”-shaped transparentportion. In this case, a portion of the HTL 136 b substantiallyoverlapping the upper surface of the PDL 120 may be transformed into thesecond pattern 134. A portion of the HTL 136 b substantially overlappinga portion of the substrate 100 between the adjacent first electrodes 110spaced apart from each other in the second direction may be transformedinto a third pattern 138 a.

In some exemplary embodiments, as illustrated in FIG. 23, the PDL 120may include the carbon-fluorine combined molecules. However, the HTL 136b may not include the carbon-fluorine combined molecules. In this case,the fluorine atoms, fluorine ions and/or fluorine-containing ionsdiffused from the PDL 120 may be fixed so as to form thefluorine-containing layer 143 on the second pattern 134. However, thefluorine-containing layer may not be formed on the third pattern 138 a.The third pattern 138 a may have an upper surface substantially coplanarwith that of the first pattern 132.

Referring now to FIGS. 25 and 26, the PDL 120 may have a linear shapeextending in the second direction, and the exposure process may becarried out by a mask including a substantially “H”-shaped transparentportion. In this case, a portion of the HTL 136 b substantiallyoverlapping the upper surface of the PDL 120 may be transformed into thesecond pattern 134. A portion of the HTL 136 b substantially overlappinga portion of the substrate 100 between the adjacent first electrodes 110spaced apart from each other in the second direction may be transformedinto the third pattern 138 a. The fluorine atoms, fluorine ions and/orfluorine-containing ions diffused from the PDL 120 and/or the secondpattern 134 may be fixed so as to form a first fluorine-containing layer143 a on the second pattern 134, and the fluorine atoms, fluorine ionsand/or fluorine-containing ions diffused from the third pattern 138 amay be fixed so as to form a second fluorine-containing layer 143 c onthe third pattern 138 a.

As illustrated in FIG. 25, the second fluorine-containing layer 143 cmay have an upper surface substantially coplanar with that of the firstpattern 132.

Referring to FIG. 39, an EML 150 may be formed on the first pattern 132.The EML 150 may be obtained by a nozzle printing process, an inkjetprinting process, a transfer process through heat or laser, etc.

Referring now to FIGS. 16 and 17, an EML 150 f may be formed by, e.g.,an inkjet process. In this case, the fluorine-containing layers 143 aand 143 b having hydrophobicity and relatively low ink-affinity may beformed on the second and third patterns 134 and 138, respectively.Furthermore, the second and third patterns 134 and 138, respectively,may have upper surfaces substantially higher than that of the firstpattern 132. Thus, the EML 150 f having a substantially island shape maybe formed selectively on the first pattern 132 by the chemicalproperties and gravity. Therefore, blurring or smearing of ink ontonon-pixel regions may be prevented so that the OLED device may haveimproved resolution or contrast.

Referring now to FIGS. 16 and 18, an EML 150 g may be also formed by,e.g., a nozzle printing process. In this case, the EML 150 g may beformed continuously on the first pattern 132 and the secondfluorine-containing layer 143 b in the second direction.

Referring now to FIGS. 19 and 20, an EML 150 h may be formed by, e.g., anozzle printing process. In this case, the EML 150 h may be formedcontinuously on the first pattern 132 in the second direction.

Referring now to FIGS. 21 and 22, an EML 150 i may be formed by, e.g., anozzle printing process. In this case, the EML 150 i may be formedcontinuously on the first pattern 132 in the second direction.

Referring now to FIGS. 23 and 24, an EML 150 j may be formed by, e.g., anozzle printing process. In this case, the EML 150 j may have a linearshape extending on the first pattern 132 and the third pattern 138 a inthe second direction.

Referring now to FIGS. 25 and 26, an EML 150 k may be formed by, e.g., anozzle printing process. In this case, the EML 150 k may have a linearshape extending on the first pattern 132 and the secondfluorine-containing layer 143 c in the second direction.

Referring now to FIG. 39, a second intermediate layer 160 may be formedon the HTL 136 b and the EML 150, and a second electrode 170 may beformed on the second intermediate layer 160. Additionally, a protectionlayer (not illustrated) and an upper substrate (not illustrated) may beformed on the second electrode 170 so as to obtain the OLED deviceaccording to exemplary embodiments.

In some exemplary embodiments, a third electrode electrically connectedto a lead on a peripheral portion of the substrate 100 may be furtherformed on the second electrode 170 by processes substantially the sameas, or similar to, those illustrated with reference to FIGS. 31 through33.

The foregoing is illustrative of exemplary embodiments and is not to beconstrued as limiting thereof. Although a few exemplary embodiments havebeen described, those skilled in the art will readily appreciate thatmany modifications are possible in the exemplary embodiments withoutmaterially departing from the novel teachings and advantages of theinvention. Accordingly, all such modifications are intended to beincluded within the scope of the invention as defined in the claims. Inthe claims, means-plus-function clauses are intended to cover thestructures described herein as performing the recited function, and notonly structural equivalents but also equivalent structures. Therefore,it is to be understood that the foregoing is illustrative of variousexemplary embodiments and is not to be construed as limited to thespecific exemplary embodiments disclosed, and that modifications to thedisclosed exemplary embodiments, as well as other exemplary embodiments,are intended to be included within the scope of the appended claims.

What is claimed is:
 1. An organic light emitting device, comprising: aplurality of first electrodes spaced apart from each other on asubstrate; a pixel defining layer disposed on the substrate, the pixeldefining layer partially exposing the first electrodes; a firstintermediate layer disposed on the pixel defining layer and the exposedfirst electrode; a fluorine-containing layer formed on a portion of thefirst intermediate layer overlapping an upper surface of the pixeldefining layer, the fluorine-containing layer including fluorinediffused from the pixel defining layer or the first intermediate layer;an emitting layer at least partially disposed on a portion of the firstintermediate layer not including the fluorine-containing layer thereon;and a second electrode disposed on the emitting layer.
 2. The device ofclaim 1, wherein the first intermediate layer includes a first patternoverlapping the exposed first electrodes and a second patternoverlapping the pixel defining layer.
 3. The device of claim 2, whereinthe second pattern has an electrical conductivity less than anelectrical conductivity of the first pattern or an electrical resistancegreater than an electrical resistance of the first pattern.
 4. Thedevice of claim 2, wherein the second pattern has an upper surfacehigher than an upper surface of the first pattern.
 5. The device ofclaim 2, wherein the fluorine-containing layer is formed on the secondpattern.
 6. The device of claim 2, wherein the first intermediate layerfurther includes a third pattern overlapping a portion of the substratebetween adjacent first electrodes spaced apart from each other.
 7. Thedevice of claim 6, wherein the third pattern has an electricalconductivity less than an electrical conductivity of the first patternor an electrical resistance greater than an electrical resistance of thefirst pattern.
 8. The device of claim 6, wherein the fluorine-containinglayer includes a first fluorine-containing layer disposed on the secondpattern and a second fluorine-containing layer disposed on the thirdpattern.
 9. The device of claim 6, wherein the third pattern has anupper surface higher than an upper surface of the first pattern.
 10. Thedevice of claim 1, further comprising: a lead on the substrate, the leadbeing spaced apart from the first electrodes; and a third electrodedisposed and extending on the second electrode and the substrate, thethird electrode being electrically connected to the lead; wherein thethird electrode is spaced apart from the first electrodes by aninsulation layer pattern, the insulation layer pattern including thepixel defining layer and the first intermediate layer.
 11. The device ofclaim 10, wherein the insulation layer pattern and the second electrodeshare a common etched surface.
 12. An organic light emitting device,comprising: a plurality of first electrodes spaced apart from each otheron a substrate; a first intermediate layer covering the first electrodeson the substrate; an emitting layer disposed on the first intermediatelayer, the emitting layer overlapping the first electrodes; and a secondelectrode disposed on the emitting layer; wherein the first intermediatelayer includes: a first pattern overlapping the first electrodes; asecond pattern confining a lateral portion of the emitting layer; and athird pattern overlapping a portion of the substrate between adjacentfirst electrodes spaced apart from each other, the third pattern havingan electrical conductivity less than an electrical conductivity of thefirst pattern or an electrical resistance greater than an electricalresistance of the first pattern.
 13. The device of claim 12, wherein theemitting layer extends continuously over the plurality of firstelectrodes.
 14. The device of claim 12, wherein the emitting layer isconfined by the second pattern and the third pattern so as to have anisland shape.
 15. The device of claim 12, wherein the third pattern hasan ink-affinity less than an ink-affinity of the first pattern.
 16. Thedevice of claim 12, further comprising a fluorine-containing layerdisposed on the third pattern.
 17. The device of claim 16, wherein thefluorine-containing layer includes fluorine diffused from the firstintermediate layer.
 18. The device of claim 12, wherein the thirdpattern has an upper surface higher than an upper surface of the firstpattern.
 19. The device of claim 12, wherein the second pattern has anink-affinity less than an ink-affinity of the first pattern.
 20. Thedevice of claim 12, further comprising a fluorine-containing layerdisposed on the second pattern.
 21. The device of claim 20, wherein thefluorine-containing layer includes fluorine diffused from the firstintermediate layer.
 22. The device of claim 12, wherein the secondpattern has an electrical conductivity less than an electricalconductivity of the first pattern or an electrical resistance greaterthan an electrical resistance of the first pattern.
 23. The device ofclaim 12, further comprising: a lead disposed on the substrate, the leadbeing spaced apart from the first electrodes; and a third electrodedisposed and extending on the second electrode and the substrate, thethird electrode being electrically connected to the lead; wherein thethird electrode is spaced apart from the first electrodes by aninsulation layer pattern, the insulation layer pattern including thefirst intermediate layer.
 24. The device of claim 23, wherein theinsulation layer pattern and the second electrode share a common etchedsurface.
 25. An organic light emitting device, comprising: a pluralityof first electrodes spaced apart from each other on a substrate; a firstintermediate layer covering the first electrodes on the substrate; anemitting layer disposed on the first intermediate layer, the emittinglayer overlapping the first electrodes; and a second electrode disposedon the emitting layer; wherein the first intermediate layer includes: afirst pattern overlapping the first electrodes; a second patternconfining a lateral portion of the emitting layer; and a third patternoverlapping a portion of the substrate between adjacent first electrodesspaced apart from each other, the third pattern having an ink-affinityless than an ink-affinity of the first pattern.
 26. The device of claim25, further comprising a fluorine-containing layer disposed on the thirdpattern.
 27. The device of claim 26, wherein the fluorine-containinglayer includes fluorine diffused from the first intermediate layer. 28.The device of claim 25, wherein the third pattern has an electricalconductivity less than an electrical conductivity of the first patternor an electrical resistance greater than an electrical resistance of thefirst pattern.
 29. The device of claim 25, wherein the third pattern hasan upper surface higher than an upper surface of the first pattern. 30.The device of claim 25, wherein the second pattern has an ink-affinityless than an ink-affinity of the first pattern.
 31. The device of claim25, further comprising a fluorine-containing layer disposed on thesecond pattern.
 32. The device of claim 31, wherein thefluorine-containing layer includes fluorine diffused from the firstintermediate layer.
 33. The device of claim 25, wherein the secondpattern has an electrical conductivity less than an electricalconductivity of the first pattern or an electrical resistance greaterthan an electrical resistance of the first pattern.
 34. The device ofclaim 25, wherein the emitting layer extends continuously over theplurality of first electrodes.
 35. The device of claim 25, wherein theemitting layer is confined by the second pattern and the third patternso as to have an island shape.
 36. The device of claim 25, furthercomprising: a lead on the substrate, the lead being spaced apart fromthe first electrodes; and a third electrode disposed and extending onthe second electrode and the substrate, the third electrode beingelectrically connected to the lead; wherein the third electrode isspaced apart from the first electrode by an insulation layer pattern,the insulation layer pattern including the first intermediate layer. 37.The device of claim 36, wherein the insulation layer pattern and thesecond electrode share a common etched surface.
 38. An organic lightemitting device, comprising: a plurality of first electrodes spacedapart from each other on a substrate; a first intermediate layercovering the first electrodes on the substrate; an emitting layerdisposed on the first intermediate layer, the emitting layer overlappingthe first electrodes; and a second electrode disposed on the emittinglayer; wherein the first intermediate layer includes: a first patternoverlapping the first electrodes; a second pattern confining a lateralportion of the emitting layer; and a third pattern overlapping a portionof the substrate between adjacent first electrodes spaced apart fromeach other, the third pattern having an electrical conductivity greaterthan an electrical conductivity of the second pattern or an electricalresistance less than an electrical resistance of the second pattern. 39.The device of claim 38, further comprising a fluorine-containing layerdisposed on the second pattern.
 40. The device of claim 39, wherein thefluorine-containing layer includes fluorine diffused from the firstintermediate layer.
 41. The device of claim 38, wherein the secondpattern has an upper surface higher than an upper surface of the thirdpattern.
 42. The device of claim 38, further comprising: a lead disposedon the substrate, the lead being spaced apart from the first electrodes;and a third electrode disposed and extending on the second electrode andthe substrate, the third electrode being electrically connected to thelead; wherein the third electrode is spaced apart from the firstelectrodes by an insulation layer pattern, the insulation layer patternincluding the first intermediate layer.
 43. The device of claim 42,wherein the insulation layer pattern and the second electrode share acommon etched surface.
 44. An organic light emitting device, comprising:a plurality of first electrodes spaced apart from each other on asubstrate; a first intermediate layer covering the first electrodes onthe substrate; an emitting layer disposed on the first intermediatelayer, the emitting layer overlapping the first electrodes; and a secondelectrode disposed on the emitting layer, wherein the first intermediatelayer includes: a first pattern overlapping the first electrodes; asecond pattern confining a lateral portion of the emitting layer; and athird pattern overlapping a portion of the substrate between adjacentfirst electrodes spaced apart from each other, the third pattern havingan ink-affinity greater than an ink-affinity of the second pattern. 45.The device of claim 44, further comprising a fluorine-containing layerdisposed on the second pattern.
 46. The device of claim 45, wherein thefluorine-containing layer includes fluorine diffused from the firstintermediate layer.
 47. The device of claim 44, wherein the secondpattern has an electrical conductivity less than an electricalconductivity of the third pattern or an electrical resistance greaterthan an electrical resistance of the third pattern.
 48. The device ofclaim 44, wherein the second pattern has an upper surface higher than anupper surface of the third pattern.
 49. The device of claim 44, furthercomprising: a lead disposed on the substrate, the lead being spacedapart from the first electrodes; and a third electrode disposed andextending on the second electrode and the substrate, the third electrodebeing electrically connected to the lead; wherein the third electrode isspaced apart from the first electrodes by an insulation layer pattern,the insulation layer pattern including the first intermediate layer. 50.The device of claim 49, wherein the insulation layer pattern and thesecond electrode share a common etched surface.